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Molecular Pump

Molecular Pump

Agilent offers a unique range of stable and reliable turbomolecular vacuum pumps and controllers that provide reliable vacuum environments for a wide range of applications in academia, research, nanotechnology, analytical instrumentation and industry. Agilent's turbomolecular pumps offer pumping speeds ranging from 70-2300 L/s and feature a number of innovative designs, backed by comprehensive testing and reliable after-sales support.

Molecular Pump Overview

Agilent offers a unique range of stable and reliable turbomolecular vacuum pumps and controllers that provide reliable vacuum environments for a wide range of applications in academia, research, nanotechnology, analytical instrumentation and industry. Agilent's turbomolecular pumps offer pumping speeds ranging from 70-2300 L/s and feature a number of innovative designs, backed by comprehensive testing and reliable after-sales support.


Agilent TwisTorr Technology
-The momentum required for the pumping effect comes from the rotor disc and is transferred to the gas molecules.
-The gas molecules are forced to move along a spiral channel in the stator disc. The special design of the channels ensures a constant local pumping speed and avoids reverse pressure gradients to significantly reduce power consumption.

Centripetal pumping action
The lower surface area of the rotor disc transfers momentum to the gas molecules.
Centripetal pumping is generated by a spiral channel located on the upper surface of the TwisTorr stator disc.
Centrifugal pumping
The upper surface area of the rotor disc transfers momentum to the gas molecules.

Good Performance
TwisTorr pumps offer class-leading pumping speeds for all gases.
-Advanced TwisTorr technology also enables high compression ratios for light gases in commercially available turbomolecular pumps.
-While achieving high performance, the new drag stage design reduces average power consumption by up to a quarter compared to previous designs.

Space-saving design
Our rotors are based on the proven Agilent one-piece rotor design, in which the TwisTorr stator disc is placed between two smooth rotor discs, allowing pumping to be achieved through two rotor disc surfaces connected in series.
TwisTorr stator discs are placed between two smooth rotor discs, allowing pumping through two rotor disc surfaces in series
The TwisTorr stator disc's double-sided helical channel design combines centripetal and centrifugal pumping in tandem, significantly reducing the size of the drag stage.

Compression ratio
-A single TwisTorr stage provides up to 100 times more N2 compression than a MacroTorr stage of the same size and speed, without reducing the front stage pressure or pumping speed.

Molecular Pump Technical Parameter

Molecular Pump Basic Configuration

Semiconductor
IC
Wafer

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