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PSM-4K Series

PSM-4K Series

PSM-4K series cryogenic probe station is a closed-cycle cryogenic probe station, compact and low vibration design, can provide a <5K-350K high and low temperature vacuum test environment for semiconductor chip electrical parameter testing.

PSM-4K Series Overview

  The 4K closed-cycle cryogenic probe station plays a vital role in scientific research and technology development. It is capable of performing various non-destructive physical and electrical property tests on samples in a low-temperature environment, helping researchers to gain a deeper understanding of the various physical and electrical properties of materials or devices, thus providing important data support for the research and development and application of new materials.


  The PSM-4K series cryogenic probe station is a high performance closed-cycle cryogenic probe station with a compact and low vibration design that provides a <5K-350K high and low temperature vacuum test environment for electrical parameter testing of semiconductor chips. The closed-cycle refrigeration eliminates the need for liquid helium and provides a temperature of 4.5K.


Features:
- Closed-cycle refrigeration without liquid helium consumption at 4.5K.
- Probe arm displacement adjustment is operated outside the vacuum chamber, allowing different devices on the sample to be switched for testing without destroying the vacuum.
- The unique four-dimensional X-Y-Z-R adjustment of the probe arm allows testing of up to 4-inch samples.
- The vacuum chamber is made of aluminium, which can effectively reduce external electromagnetic interference and improve the accuracy and stability of the test.
- The probe arm adopts tri-coaxial connector, good leakage performance, measured leakage current is less than 100fA @ 1V@4.5K-350K.
- Wide test temperature range, support 4.5K-350K continuous temperature change.
- Uniquely designed flexible probe, the probe is mounted on the copper shrapnel, avoiding excessive force during the pinning process leading to sample or electrode damage.

PSM-4K Series Technical Parameter


PSM-4K Series Basic Configuration

Semiconductor
IC
Wafer

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